Contrast differences between scanning ion and scanning electron microscope images

被引：19

作者：

Suzuki, T

Endo, N

Shibata, M

Kamasaki, S

Ichinokawa, T

机构：

[1] JEOL Ltd, Applicat & Res Ctr, Akishima, Tokyo 1968558, Japan

[2] Tokyo Metropolitan Univ, Grad Sch Engn, Dept Appl Chem, Hachioji, Tokyo 1920364, Japan

[3] Waseda Univ, Dept Appl Phys, Shinjuku Ku, Tokyo 1698555, Japan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2004年 / 22卷 / 01期

关键词：

D O I：

10.1116/1.1626646

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The contrasts of scanning ion microscope images (Ga+ ion) at 30 keV are compared to those of scanning electron microscope images at 30 keV. Remarkable differences are observed in the surface sensitivity, crystal orientation, and atomic number effects of target material. The examples are shown by the secondary electron images and the origins of those differences are discussed on the basis of the different interactions of those particles with solid. (C) 2004 American Vacuum Society.

引用

页码：49 / 52

页数：4

共 12 条

[1] ON THE Z1 DEPENDENCE OF ION-INDUCED KINETIC ELECTRON-EMISSION [J].

FERGUSON, MM ;

HOFER, WO .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1989, 109 (1-4) :273-280

[2]

Hirsch, 1965, ELECT MICROSCOPY THI

[3]

ICHIMURA S, 1983, SURF SCI, V124, pL49, DOI 10.1016/0039-6028(83)90791-4

[4] Origins of material contrast in scanning ion microscope images [J].

Ishitani, T ;

Madokoro, Y ;

Nakagawa, W ;

Ohya, K .

JOURNAL OF ELECTRON MICROSCOPY, 2002, 51 (04) :207-213

[5] PENETRATION AND ENERGY-LOSS THEORY OF ELECTRONS IN SOLID TARGETS [J].

KANAYA, K ;

OKAYAMA, S .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1972, 5 (01) :43-&

[6] Dependencies of secondary electron yields on work function for metals by electron and ion bombardment [J].

Kudo, M ;

Sakai, Y ;

Ichinokawa, T .

APPLIED PHYSICS LETTERS, 2000, 76 (23) :3475-3477

[7]

LEVISETTI R, 1983, SCANNING ELECTRON MI, V1, P1

[8] ENERGY DISSIPATION BY IONS IN KEV REGION [J].

LINDHARD, J ;

SCHARFF, M .

PHYSICAL REVIEW, 1961, 124 (01) :128-+

[9]

NELSON RB, 1986, OBSERVATION ATOMIC C

[10] FOCUSED ION-BEAM SYSTEMS FOR MATERIALS ANALYSIS AND MODIFICATION [J].

PREWETT, PD .

VACUUM, 1984, 34 (10-1) :931-939

← 1 2 →