FOCUSED ION-BEAM SYSTEMS FOR MATERIALS ANALYSIS AND MODIFICATION

被引：15

作者：

PREWETT, PD

机构：

[1] Dubilier Scientific, Abingdon, Engl, Dubilier Scientific, Abingdon, Engl

来源：

VACUUM | 1984年 / 34卷 / 10-1期

关键词：

INTEGRATED CIRCUIT MANUFACTURE - ION BEAMS - Applications - LITHOGRAPHY;

D O I：

10.1016/0042-207X(84)90174-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The development of the liquid metal ion source has had a significant impact upon the applications of focused ion beam systems. Recent developments in the fields of microcircuit fabrication technology and analytical microscopy have been directly inspired by the LMIS and are reviewed here.

引用

页码：931 / 939

页数：9

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