Cr-AlN thin film;
dilute magnetic semiconductor;
Mn-AlN thin film;
room temperature ferromagnetism;
D O I:
10.1109/TMAG.2005.854686
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
We have studied magnetic, electrical properties, and structure of Cr-AIN and Mn-AIN thin films grown on the Si substrates. Each magnetic state in Al-0.93 Cr-0.07 N and Al-0.91 Mn-0.09 N thin films changes from a paramagnetic state to a superparamagnetic state as temperature decreases. Room temperature (RT) ferromagnetism cannot be observed in each thin film. Each electrical property in Al-0.93 Cr-0.07 N and Al0.91Mn0.09N thin films becomes semiconducting, since the electrical resistivities of these thin films are higher than 10(7)mu Omega(.)cm at RT. At 77 K, tunneling phenomena for the Al0.93Cr0.07N thin film and rectification for the Al-0.91 Mn0.09N thin film can be observed. Furthermore, the crystal structure in each thin film is also a polycrystalline structure with the preferential orientation of hcp (0001).