Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners

被引：94

作者：

Schroth, A ^{[1
]}

Lee, C ^{[1
]}

Matsumoto, S ^{[1
]}

Maeda, R ^{[1
]}

机构：

[1] AIST, AIST, Mech Engn Lab, Surface & Interface Technol Div, Tsukuba, Ibaraki 305, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 73卷 / 1-2期

关键词：

D O I：

10.1016/S0924-4247(98)00265-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thin sol-gel deposited piezoelectric PZT layers can be used to actuate microelectromechanical systems (MEMS) by applying an appropriate design for the actuators. Aside from the small sized structures, further advantages are low stimulation voltage with reasonable output angles, and very high scanning frequencies. By applying a structured electrode design, for multi-degree of freedom movement higher controllability of the behavior can be achieved.

引用

页码：144 / 152

页数：9

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