Atomic force microscopy study of TiO2 films obtained by the sol-gel method

被引：33

作者：

Zaharescu, M ^{[1
]}

Crisan, M ^{[1
]}

Musevic, I ^{[1
]}

机构：

[1] Romanian Acad, Inst Phys Chem, Bucharest 77208, Romania

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 1998年 / 13卷 / 1-3期

关键词：

TiO2; films; sol-gel method; AFM study;

D O I：

10.1023/A:1008673812626

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Atomic Force Microscopy (AFM) was used to study the influence of thermal treatments on the structural and textural properties of the sol-gel TiO2 films obtained from Ti(OC3H7i)(4). X-ray diffraction (XRD), ellipsometric and porosity measurements have also been made. The TiO2 sol-gel films were homogeneous, transparent and amorphous. Heat treatments in the 400-600 degrees C range indicate that the films have a strong tendency to crystallization. The high initial homogeneity of the TiO2 films was preserved during the crystallization process. AFM shows that the thermally treated films exhibit uniform, monodispersed crystals.

引用

页码：769 / 773

页数：5

共 17 条

[1]

[Anonymous], ULTRASTRUCTURE PROCE

[2]

Bradley D.C., 1978, METAL ALKOXIDES

[3]

CRISAN M, 1994, P 8 CIMTECH B 13 4 F

[4] SOL-GEL PROCESSING OF TITANIUM-CONTAINING THIN COATINGS .3. PROPERTIES [J].

KOZHUKHAROV, V ;

TRAPALIS, C ;

SAMUNEVA, B .

JOURNAL OF MATERIALS SCIENCE, 1993, 28 (05) :1283-1288

[5] SOL-GEL CHEMISTRY OF TRANSITION-METAL OXIDES [J].

LIVAGE, J ;

HENRY, M ;

SANCHEZ, C .

PROGRESS IN SOLID STATE CHEMISTRY, 1988, 18 (04) :259-341

[6] SOL-GEL PROCESSING OF TITANIUM-CONTAINING THIN COATINGS .1. PREPARATION AND STRUCTURE [J].

SAMUNEVA, B ;

KOZHUKHAROV, V ;

TRAPALIS, C ;

KRANOLD, R .

JOURNAL OF MATERIALS SCIENCE, 1993, 28 (09) :2353-2360

[7]

SANCHEZ C, 1990, NEW J CHEM, V14, P513

[8] CHEMICAL MODIFICATION OF ALKOXIDE PRECURSORS [J].

SANCHEZ, C ;

LIVAGE, J ;

HENRY, M ;

BABONNEAU, F .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 100 (1-3) :65-76

[9] SOL-GEL PROCESSING OF TITANIUM-CONTAINING THIN COATINGS .2. XPS STUDIES [J].

TRAPALIS, C ;

KOZHUKHAROV, V ;

SAMUNEVA, B ;

STEFANOV, P .

JOURNAL OF MATERIALS SCIENCE, 1993, 28 (05) :1276-1282

[10] SOL-GEL TIO2 FILMS ON SILICON SUBSTRATES [J].

VOROTILOV, KA ;

ORLOVA, EV ;

PETROVSKY, VI .

THIN SOLID FILMS, 1992, 207 (1-2) :180-184

← 1 2 →