C2 swan band emission intensity as a function of C2 density

被引:61
作者
Goyette, AN
Lawler, JE
Anderson, LW
Gruen, DM
McCauley, TG
Zhou, D
Krauss, AR
机构
[1] Univ Wisconsin, Dept Phys, Madison, WI 53706 USA
[2] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA
[3] Argonne Natl Lab, Div Chem, Argonne, IL 60439 USA
关键词
D O I
10.1088/0963-0252/7/2/009
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
We report the systematic comparison of the optical emission intensity of the d(3) Pi --> a(3) Pi (0, 0) vibrational band of the C-2 Swan system with the absolute C-2 concentration in Ar/H-2/CH4 and Ar/H-2/C-60 microwave plasmas used in the deposition of nanocrystalline diamond. The absolute C-2 concentration is obtained using white-light absorption spectroscopy. Emission intensity correlates linearly with C-2 density for variations of several plasma parameters and across two decades of species concentration. Although optical emission intensity generally is not an accurate quantitative diagnostic for gas phase species concentrations, these results confirm the reliability of the (0,0) Swan band for relative determination of Cp density with high sensitivity under conditions used for hydrogen-deficient plasma-enhanced chemical vapour deposition of diamond.
引用
收藏
页码:149 / 153
页数:5
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