Influence of the bias voltage on the structure and the tribological performance of nanoscale multilayer C/Cr PVD coatings

被引:64
作者
Kok, YN
Hovsepian, PE
Luo, Q
Lewis, DB
Wen, JG
Petrov, I
机构
[1] Sheffield Hallam Univ, Inst Mat Res, Sheffield S1 1WB, S Yorkshire, England
[2] Univ Illinois, Dept Mat Sci, Urbana, IL 61801 USA
[3] Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
关键词
sputtering; C/Cr coating; bias voltage; tribology; microstructure;
D O I
10.1016/j.tsf.2004.08.042
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nanoscale multilayer C/Cr coatings have been deposited by utilising the combined steered cathodic arc/unbalanced magnetron sputtering technique. The coating microstructure and tribological performance have been investigated as a function of the bias voltage, ranging from U-b=-65 to -350 V. The XRD results revealed that C/Cr coatings are amorphous at low U-b, but became more crystalline when the Ub increased to -350 V. High-resolution XTEM analysis indicated coating densification and smoothening as well as formation of novel amorphous nanostructure, in which carbon-rich clusters are surrounded by a Cr-rich matrix, leading to the formation of self-organised multilayer structure as the bias voltage was increased from -65 to -350 V. An increase of the bias voltage from -65 to -350 V resulted in an increase in the hardness from 8 to 25 CiPa and Young's modulus, E from 186 to 319 GPa. A pin-on-disc test showed that the friction coefficient was reduced from 0.22 to 0.16 when the bias voltage was increased from -65 to -95 V However, a further increase in the bias voltage to -350 V led to an increase in the friction coefficient to 0.31. The lowest wear coefficient K(c)similar to6.25 x 10(-17) m(3) N-1 m(-1) was achieved at U-b = - 120 V. Standard HSS drills, 8 mm in diameter, coated with C/Cr have been tested using solution annealed AISI 304 stainless steel as the work piece material. An improvement of the lifetime by a factor of similar to9 has been achieved as compared to the uncoated tools. In this test, the C/Cr coating outperformed a number of commercially available PVD coatings, such as TiCN, TiAlCrN and showed similar performance to TiAlCrYN. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:219 / 226
页数:8
相关论文
共 31 条
[1]   PROPERTIES AND APPLICATIONS OF DIAMONDLIKE CARBON-FILMS [J].
AISENBERG, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :369-371
[2]  
BLOYCE A, 2000, MAT WORLD MAR, P13
[3]   Microstructure investigation of magnetron sputtered WC/C coatings deposited on steel substrates [J].
Carvalho, NJM ;
DeHosson, JTM .
THIN SOLID FILMS, 2001, 388 (1-2) :150-159
[4]  
CLAUSS FJ, 1972, SOLID LUBRICANTS SEL, P45
[5]   ION SURFACE INTERACTIONS DURING VAPOR-PHASE CRYSTAL-GROWTH BY SPUTTERING, MBE, AND PLASMA-ENHANCED CVD - APPLICATIONS TO SEMICONDUCTORS [J].
GREENE, JE ;
BARNETT, SA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02) :285-302
[6]   Tribology of diamondlike carbon and related materials: an updated review [J].
Grill, A .
SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3) :507-513
[7]  
GRISCHKE M, 2001, 44 ANN TECHN C P, P407
[8]   Micromechanical properties of amorphous carbon coatings deposited by different deposition techniques [J].
Gupta, BK ;
Bhushan, B .
THIN SOLID FILMS, 1995, 270 (1-2) :391-398
[9]   Structure and tribological behaviour of nanoscale multilayer C/Cr coatings deposited by the combined steered cathodic arc/unbalanced magnetron sputtering technique [J].
Hovsepian, PE ;
Kok, YN ;
Ehiasarian, AP ;
Erdemir, A ;
Wen, JG ;
Petrov, I .
THIN SOLID FILMS, 2004, 447 :7-13
[10]   Combined steered cathodic arc/unbalanced magnetron grown C/Cr nanoscale multilayer coatings for tribological applications [J].
Hovsepian, PE ;
Lewis, DB ;
Constable, C ;
Luo, Q ;
Kok, YN ;
Münz, WD .
SURFACE & COATINGS TECHNOLOGY, 2003, 174 :762-769