ION SURFACE INTERACTIONS DURING VAPOR-PHASE CRYSTAL-GROWTH BY SPUTTERING, MBE, AND PLASMA-ENHANCED CVD - APPLICATIONS TO SEMICONDUCTORS

被引：136

作者：

GREENE, JE ^{[1
]}

BARNETT, SA ^{[1
]}

机构：

[1] UNIV ILLINOIS,MAT RES LAB,DEPT MET,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 02期

关键词：

D O I：

10.1116/1.571767

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：285 / 302

页数：18

共 170 条

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