A novel self-generating liquid MOCVD precursor for Co3O4 thin films

被引:98
作者
Gulino, A
Dapporto, P
Rossi, P
Fragalà, I
机构
[1] Univ Catania, Dipartimento Sci Chim, I-95125 Catania, Italy
[2] INSTM, UdR Catania, I-95125 Catania, Italy
[3] Univ Florence, Dipartimento Energet, I-50139 Florence, Italy
关键词
D O I
10.1021/cm034305z
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The novel [Co(C5F6HO2)2· 2H2O·CH3(OCH2CH2) 4-OCH3] low-melting adduct has been synthesized and characterized. Very mild heating results in the anhydrous Co(hfac) 2tetraglyme liquid and thermal stable complex that evaporates intact. This adduct has proven to be a well-suited precursor for MOCVD of cobalt oxide films.
引用
收藏
页码:3748 / 3752
页数:5
相关论文
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