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A novel self-generating liquid MOCVD precursor for Co3O4 thin films

被引：98
作者：
Gulino, A
Dapporto, P
Rossi, P
Fragalà, I
机构：
[1] Univ Catania, Dipartimento Sci Chim, I-95125 Catania, Italy
[2] INSTM, UdR Catania, I-95125 Catania, Italy
[3] Univ Florence, Dipartimento Energet, I-50139 Florence, Italy
来源：
CHEMISTRY OF MATERIALS | 2003年 / 15卷 / 20期
关键词：
D O I：
10.1021/cm034305z
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The novel [Co(C5F6HO2)2· 2H2O·CH3(OCH2CH2) 4-OCH3] low-melting adduct has been synthesized and characterized. Very mild heating results in the anhydrous Co(hfac) 2tetraglyme liquid and thermal stable complex that evaporates intact. This adduct has proven to be a well-suited precursor for MOCVD of cobalt oxide films.
引用
收藏
页码：3748 / 3752
页数：5
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