Force-deflection characterization of individual carbon nanotubes attached to MEMS devices

被引：1

作者：

Hartman, AB ^{[1
]}

Rice, P ^{[1
]}

Finch, DS ^{[1
]}

Skidmore, GD ^{[1
]}

Bright, VM ^{[1
]}

机构：

[1] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA

来源：

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/MEMS.2004.1290613

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Results are presented for in-situ manipulation, attachment, and mechanical testing of individual carbon nanotubes (CNTs) on MEMS devices. Nanotubes positioned onto polysilicon structures were permanently attached by electron beam deposition (EBD) "welding". This approach allows design of mechanical tests for nanotubes with commercially available MEMS processes. A tensile force of 2.4 +/- 0.2 AN was applied to the structure via an attached, individual CNT, producing device deflections measured in a scanning electron microscope. Based on atomic force microscopy of welds, the joint between the EBD material and MEMS surface supported a shear stress of 1.6 +/- 0.5 MPa.

引用

页码：426 / 429

页数：4

共 8 条

[1] Directed growth of free-standingsingle-walled carbon nanotubes [J].