Acoustic wave technology sensors

被引:192
作者
Drafts, B [1 ]
机构
[1] Microsensor Syst Inc, Apopka, FL 32703 USA
关键词
BAW sensors; SAW sensors; sensor applications;
D O I
10.1109/22.915466
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A brief overview of acoustic wave sensor physics, materials, sensor types, and applications is presented in this paper, Emphasis is placed on the different types of acoustic wave sensors, their respective advantages, and their specific applications in industry.
引用
收藏
页码:795 / 802
页数:8
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