The study of composition non-uniformity in ternary MgxZn1-xO thin films

被引：128

作者：

Chen, J

Shen, WZ

Chen, NB

Qiu, DJ

Wu, HZ

机构：

[1] Shanghai Jiao Tong Univ, Dept Phys, Lab Condensed Matter Spect & Opto Elect Phys, Shanghai 200030, Peoples R China

[2] Zhejiang Univ, Dept Phys, Hangzhou 310028, Peoples R China

[3] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China

来源：

JOURNAL OF PHYSICS-CONDENSED MATTER | 2003年 / 15卷 / 30期

关键词：

D O I：

10.1088/0953-8984/15/30/102

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We report on the growth of single cubic-phase MgZnO thin films by reactive electron beam evaporation on sapphire substrates. A detailed theoretical procedure has been employed to analyse the transmission profile for information on composition non-uniformity, in addition to the exact determination of the band gap energy. The study of composition non-uniformity has been further extended to both the typically reported hexagonal and cubic MgZnO thin films. It is found that the composition non-uniformity strongly depends on the Mg content, which can be well explained by the ZnO-MgO phase diagram.

引用

页码：L475 / L482

页数：8

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