Microstructuring of silicon with femtosecond laser pulses

被引:746
作者
Her, TH [1 ]
Finlay, RJ
Wu, C
Deliwala, S
Mazur, E
机构
[1] Harvard Univ, Cambridge, MA 02138 USA
[2] No Telecom, Ottawa, ON K1Y 4H7, Canada
[3] Sci Res Lab Inc, Somerville, MA 02143 USA
关键词
D O I
10.1063/1.122241
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report that silicon surfaces develop an array of sharp conical spikes when irradiated with 500 laser pulses of 100-fs duration, 10-kJ/m(2) fluence in 500-Torr SF6 or Cl-2. The spikes are up to 40-mu m tall, and taper to about 1-mu m diam at the tip. Irradiation of silicon surfaces in N-2. Ne, or vacuum creates structured surfaces, but does not create sharp conical spikes. (C) 1998 American Institute of Physics.
引用
收藏
页码:1673 / 1675
页数:3
相关论文
共 18 条
[1]  
CARVALHO J, 1995, MATER RES SOC SYMP P, V358, P915
[2]   MULTIPLE PHOTON EXCITED SF6 INTERACTION WITH SILICON SURFACES [J].
CHUANG, TJ .
JOURNAL OF CHEMICAL PHYSICS, 1981, 74 (02) :1453-1460
[3]   Stoichiometric transfer of complex oxides by pulsed laser deposition [J].
Dam, B ;
Rector, JH ;
Johansson, J ;
Kars, S ;
Griessen, R .
APPLIED SURFACE SCIENCE, 1996, 96-8 :679-684
[4]   LASER CHEMICAL TECHNIQUE FOR RAPID DIRECT WRITING OF SURFACE RELIEF IN SILICON [J].
EHRLICH, DJ ;
OSGOOD, RM ;
DEUTSCH, TF .
APPLIED PHYSICS LETTERS, 1981, 38 (12) :1018-1020
[5]   SURFACE RIPPLES ON SILICON AND GALLIUM-ARSENIDE UNDER PICOSECOND LASER ILLUMINATION [J].
FAUCHET, PM ;
SIEGMAN, AE .
APPLIED PHYSICS LETTERS, 1982, 40 (09) :824-826
[6]   Three-dimensional optical storage inside transparent materials [J].
Glezer, EN ;
Milosavljevic, M ;
Huang, L ;
Finlay, RJ ;
Her, TH ;
Callan, JP ;
Mazur, E .
OPTICS LETTERS, 1996, 21 (24) :2023-2025
[7]   GROWTH OF SPONTANEOUS PERIODIC SURFACE-STRUCTURES ON SOLIDS DURING LASER ILLUMINATION [J].
GUOSHENG, Z ;
FAUCHET, PM ;
SIEGMAN, AE .
PHYSICAL REVIEW B, 1982, 26 (10) :5366-5381
[8]  
HOPP B, 1996, APPL SURF SCI, V96, P661
[9]   CHARGE EMISSION AND PRECURSOR ACCUMULATION IN THE MULTIPLE-PULSE DAMAGE REGIME OF SILICON [J].
JHEE, YK ;
BECKER, MF ;
WALSER, RM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1985, 2 (10) :1626-1633
[10]  
KAUTEK W, 1995, MATER SCI FORUM, V173-, P17, DOI 10.4028/www.scientific.net/MSF.173-174.17