Grazing incidence x-ray absorption spectra of (Si/W)100/Si multilayer

Tungsten (W) M-III x-ray absorption spectra of a periodic multilayer, (Si/W)(100)/Si, were measured with the change of x-ray grazing angle using sample current method. Under not total reflection condition, the absorbance changed little except at W M-III absorption edge. While under the total reflection condition, the absorbance increased with the increase of the X-ray energy and the increment changed from low to high at the W M-III absorption edge. This result reflected the variation of the X-ray evanescent wavelength caused by the absorption effect of W. (C) 1999 Elsevier Science B.V. All rights reserved.