Electrical and structural characterisation of mesoporous silica thin films as humidity sensors

被引:69
作者
Innocenzi, P
Martucci, A
Guglielmi, M
Bearzotti, A
Traversa, E
机构
[1] Univ Padua, Dipartimento Ingn Meccan, Settore Mat, I-35131 Padua, Italy
[2] CNR, Progetto Sensori & Microsistemi, I-00133 Rome, Italy
[3] Univ Roma Tor Vergata, Dipartimento Sci & Tecnol Chim, I-00133 Rome, Italy
关键词
mesoporous silica; humidity sensors; thin films; self-assembly process; electrical characterisation;
D O I
10.1016/S0925-4005(01)00590-1
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Mesoporous silica thin films have been prepared using a self-assembling process employing cetyltrimethylammonium bromide (CTAB) as the organic template. The films were deposited by dip-coating on silicon and alumina substrates. Thermal treatment at 250 and 450 degreesC was used to remove the organic template. Fourier transformed infra-red spectra demonstrated that calcination is complete at 450 degreesC. Electrical measurements under dry and wet conditions were performed for films deposited on alumina substrates with comb-type gold electrodes. The films showed an increase in current intensity as a function of relative humidity. No memory effects were observed after cyclic testing in dry-wet conditions. Electrical characterisation indicates that the mesophase is easily accessible by the external environment. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:299 / 303
页数:5
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