Performance improvement of CIGS-based modules by depositing high-quality Ga-doped ZnO windows with magnetron sputtering

被引：51

作者：

Sang, BS ^{[1
]}

Kushiya, K ^{[1
]}

Okumura, D ^{[1
]}

Yamase, O ^{[1
]}

机构：

[1] New Energy & Ind Technol Dev Org, Showa Shell Seikyu KK, Cent R&D Lab, Kanagawa, Japan

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2001年 / 67卷 / 1-4期

关键词：

Cu(InGa)Se-2 module; ZnO : Ga window; sputtering;

D O I：

10.1016/S0927-0248(00)00287-7

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Improvement of the performance of Cu(InGa)Se-2 (CICS)-based thin film submodules by depositing high-quality ZnO:Ca (GZO) window layers with sputtering method is performed to aim for establishing deposition technology of GZO windows of CIGS submodules. In order to reduce damage onto CIGS absorber/Zn(O,S,OH)(x) buffer interface due to the bombardment of high-energy particles during DC sputtering process of GZO window layers, growth of multilayered GZO window layers is developed. By using RF/DC/DC sputtered GZO window layers instead of the conventional DC sputtered GZO window layers, fill factor (FF) and conversion efficiency are increased over 10%. Increasing short-circuit current density (J(sc)) of CIGS submodules is also investigated by improving the transparency of GZO window layers. Furthermore, damp heat test of the sputtered GZO films is carried out, and it is found that the GZO films have good stability of electrical properties. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：237 / 245

页数：9

共 3 条

[1] Status and prospects for CIS-based photovoltaics [J].

Gay, RR .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1997, 47 (1-4) :19-26

[2] Highly stable ZnO thin films by atomic layer deposition [J].

Sang, BS ;

Yamada, A ;

Konagai, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1998, 37 (10A) :L1125-L1128

[3]

Wennerberg J., 1998, P 2 WORLD C PHOT SOL, P1161

← 1 →