Consequences of Ti-, Li-, and Er-ion implantations on the optical properties of single layers of Ta2O5

被引：5

作者：

Flory, F ^{[1
]}

Berthier, D ^{[1
]}

Rigneault, H ^{[1
]}

Roux, L ^{[1
]}

机构：

[1] ION BEAM SERV,F-13850 GREASQUE,FRANCE

来源：

APPLIED OPTICS | 1996年 / 35卷 / 25期

关键词：

thin films; ion implantation; optical properties; guided waves; luminescence;

D O I：

10.1364/AO.35.005085

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Tantalum pentoxide (Ta2O5) layers made by ion plating are implanted with a high fluence of keV Ti, Li, and Er ions. The resulting refractive-index profiles are given from the analysis of guided-wave propagation conditions. A comparison with spectrophotometric measurements is presented. All the implanted layers present low losses (extinction coefficient of some 10(-6)) after thermal annealing in air. Ti-implanted layers exhibit an increase in refractive index, whereas Li- and Er-implanted layers present a slight decrease in refractive index. Er-implanted layers present photoluminescent properties. (C) 1996 Optical Society of America

引用

页码：5085 / 5090

页数：6

共 16 条

[1]

BATHTAT A, 1994, OPT COMMUN, V111, P55

[2] REFRACTIVE-INDEX AND INHOMOGENEITY OF THIN-FILMS [J].

BORGOGNO, JP ;

FLORY, F ;

ROCHE, P ;

SCHMITT, B ;

ALBRAND, G ;

PELLETIER, E ;

MACLEOD, HA .

APPLIED OPTICS, 1984, 23 (20) :3567-3570

[3] A NEW APPROACH TO THE DETERMINATION OF PLANAR WAVE-GUIDE PROFILES BY MEANS OF A NONSTATIONARY MODE INDEX CALCULATION [J].

CHANDLER, PJ ;

LAMA, FL .

OPTICA ACTA, 1986, 33 (02) :127-143

[4]

COMMANDRE M, 1990, P SOC PHOTO-OPT INS, V1270, P82, DOI 10.1117/12.20367

[5]

COMMANDRE M, 1995, COMMUNICATION

[6]

FAVENNEC P. N., 1993, COLLECTION TECHNIQUE

[7] LUMINESCENCE OF ERBIUM IMPLANTED IN VARIOUS SEMICONDUCTORS - IV-MATERIALS, III-V-MATERIALS AND II-VI MATERIALS [J].

FAVENNEC, PN ;

LHARIDON, H ;

SALVI, M ;

MOUTONNET, D ;

LEGUILLOU, Y .

ELECTRONICS LETTERS, 1989, 25 (11) :718-719

[8]

FLORY F, 1995, THIN FILMS OPTICAL S, V49, P393

[9]

LALLIER E, 1991, P SOC PHOTO-OPT INS, V1506, P71, DOI 10.1117/12.45960

[10]

Moll E., 1986, U.S. Patent, Patent No. [4,619,748, 4619748]

← 1 2 →