Beam line BL11 for LIGA process at the NewSUBARU

被引：21

作者：

Mekaru, H ^{[1
]}

Utsumi, Y ^{[1
]}

Hattori, T ^{[1
]}

机构：

[1] Himeji Inst Technol CAST HYOGO, Lab Adv Sci & Technol Ind, Ako, Hyogo 6781205, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2001年 / 467卷

关键词：

synchrotron radiation; HXL; LIGA; micromachining; multilayered-mirror; PMMA;

D O I：

10.1016/S0168-9002(01)00484-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A beam line BL11 is constructed for exposure Hard X-ray Lithography (HXL) in the LIGA (German acronym for Lithographite Galvanoformung and Abformung) process at the synchrotron radiation (SR) facility NewSUBARU of the Laboratory of Advanced Science and Technology for Industry (LASTI) in Himeji Institute of Technology (HIT). This beam line was designed by the criteria; photon energy range 4-6 keV, a beam spot size on the exposure stage greater than or equal to 60 x 5 mm(2), a density of total irradiated photons greater than or equal to 10(11) photonS/cm(2). The PMMA sheet etching was successfully demonstrated by using the output beam. We conclude that this beam line performs sufficiently well to study the exposure of HXL in the LIGA process. (C) 2001 Elsevier Science B.V. Ali rights reserved.

引用

页码：741 / 744

页数：4

共 3 条

[1] Isochronous storage ring of the New SUBARU project [J].

Ando, A ;

Amano, S ;

Hashimoto, S ;

Kinosita, H ;

Miyamoto, S ;

Mochizuki, T ;

Niibe, M ;

Shoji, Y ;

Terasawa, M ;

Watanabe, T ;

Kumagai, N .

JOURNAL OF SYNCHROTRON RADIATION, 1998, 5 :342-344

[2]

Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3

[3] Design of LIGA beamline using a multilayer-coated reflection mirror [J].

Kinoshita, H ;

Kimpara, Y ;

Uruga, T ;

Watanabe, T ;

Niibe, M ;

Platonov, Y ;

Wood, JL .

ADVANCES IN MIRROR TECHNOLOGY FOR SYNCHROTRON X-RAY AND LASER APPLICATIONS, 1998, 3447 :2-11

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