Axiomatic Design of machine control system

被引:19
作者
Lee, KD [1 ]
Suh, NP
Oh, JH
机构
[1] MIT, Cambridge, MA 02139 USA
[2] United Technol Res Ctr, E Hartford, CT 06108 USA
来源
CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2001年 / 50卷 / 01期
关键词
machine control system; Axiomatic Design; Chemical-Mechanical Polishing;
D O I
10.1016/S0007-8506(07)62083-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Machine control system development typically relies on the developer's experience and trial-and-error. This ad hoc approach can undermine the very success of the system development, with a lengthy and costly development period and, possibly, an endless cycle of upgrade and maintenance. The resulting system also lacks the interchangeability and reusability. This paper presents the framework based on Axiomatic Design for the systematic design and implementation of machine control systems. It structures a complex control system and guides the design and development of its subcomponents. Various levels of system design issues are addressed in this structural approach. Based on the methodology presented in this paper, a control system for an industrial scale Chemical-Mechanical Polishing (CMP) machine has been developed.
引用
收藏
页码:109 / 114
页数:6
相关论文
共 7 条
[1]  
[Anonymous], 1990, PRINCIPLES DESIGN
[2]  
DEJULE R, 1997, CMP CHALLENGES SEMIC, P55
[3]   A MODEL-BASED METHOD FOR ORGANIZING TASKS IN PRODUCT DEVELOPMENT [J].
EPPINGER, SD ;
WHITNEY, DE ;
SMITH, RP ;
GEBALA, DA .
RESEARCH IN ENGINEERING DESIGN-THEORY APPLICATIONS AND CONCURRENT ENGINEERING, 1994, 6 (01) :1-13
[4]   STATECHARTS - A VISUAL FORMALISM FOR COMPLEX-SYSTEMS [J].
HAREL, D .
SCIENCE OF COMPUTER PROGRAMMING, 1987, 8 (03) :231-&
[5]  
LU SCY, 2000, ANN CIRP, V49, P69, DOI DOI 10.1016/S0007-8506(07)62898-4
[6]  
SUH NP, 2000, ANN CIRP, V49, P65
[7]  
Suh NP, 2001, Axiomatic Design: Advances and Applications