Micromachined infrared sensors using tunneling displacement transducers

被引：45

作者：

Kenny, TW ^{[1
]}

Reynolds, JK ^{[1
]}

Podosek, JA ^{[1
]}

Vote, EC ^{[1
]}

Miller, LM ^{[1
]}

Rockstad, HK ^{[1
]}

Kaiser, WJ ^{[1
]}

机构：

[1] CALTECH,JET PROP LAB,PASADENA,CA 91109

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1996年 / 67卷 / 01期

关键词：

D O I：

10.1063/1.1146559

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Uncooled infrared sensors are important for a number of technological and scientific measurements. We have designed, built, and tested a new uncooled infrared sensor which is made by silicon micromachining. This infrared sensor uses a tunneling displacement transducer to detect the thermal expansion of a small volume of trapped gas. Prototype devices based on this design have been operated with NEP better than 3X10(-10) W root Hz at 25 Hz, which is competitive with the best comparably sized uncooled sensors available. This article will describe the design, fabrication, and operation of all elements of this sensor. (C) 1996 American Institute of Physics.

引用

页码：112 / 128

页数：17

共 35 条

[1] TUNNELLING ACCELEROMETER [J].