A multilayer YBaCu3Ox Josephson junction process for digital circuit applications

被引：61

作者：

Mallison, WH

Berkowitz, SJ

Hirahara, AS

Neal, MJ

Char, K

机构：

[1] Conductus, Inc., Sunnyvale

来源：

APPLIED PHYSICS LETTERS | 1996年 / 68卷 / 26期

关键词：

D O I：

10.1063/1.116624

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have demonstrated a multilayer high-T-c junction process capable of fabricating small-scale digital circuits. The process uses superconductor/normal-metal/superconductor YBa2Cu3Ox (YBCO) edge junctions with a cobalt-doped YBCO barrier and an integrated YBCO ground plane. We have measured spreads in the junctions' critical currents as low as 12% (1 sigma) both on and off the ground plane. The proper functioning of the ground plane was verified by measuring the reduced inductance of superconducting quantum interference devices (SQUIDs) on the ground plane compared to identical SQUIDs off the ground plane. At a temperature of 70 K, the inductance on the ground plane is as low as 1.2 pH/square. The inferred YBCO penetration depth is 250 nm at 70 K and 280 nm at 77 K. (C) 1996 American Institute of Physics.

引用

页码：3808 / 3810

页数：3

共 11 条

[1] STUDY OF INTERFACE RESISTANCES IN EPITAXIAL YBA2CU3O7-X/BARRIER/YBA2CU3O7-X JUNCTIONS [J].