7.8-GHz flexible thin-film transistors on a low-temperature plastic substrate

被引:80
作者
Yuan, Hao-Chih
Celler, George K.
Ma, Zhenqiang [1 ]
机构
[1] Univ Wisconsin, Dept Elect & Comp Engn, Madison, WI 53706 USA
[2] Soitec USA, Peabody, MA 01960 USA
基金
美国国家科学基金会;
关键词
10;
D O I
10.1063/1.2761782
中图分类号
O59 [应用物理学];
学科分类号
摘要
RF flexible thin-film transistors (TFTs) with a new speed record of cut-off frequency (f(T)) of 2.04 GHz and maximum oscillation frequency (f(max)) of 7.8 GHz were realized using single-crystal Si nanomembrane as an active channel layer on a low-temperature plastic substrate. We report the detailed device layout design considerations for optimizing the frequency response of the flexible RF TFTs, supported by accurate small-signal equivalent circuit modeling. It is indicated that, by properly considering the tradeoff between the parasitic source/drain resistances and the parasitic source-to-gate/drain-to-gate capacitances, f(T) and f(max) of the single-crystal-Si TFTs can be optimized separately in order to meet the requirements of certain potential RF applications. (c) 2007 American Institute of Physics.
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页数:4
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