Thermomechanical noise of a free v-shaped cantilever for atomic-force microscopy

被引：124

作者：

Stark, RW ^{[1
]}

Drobek, T ^{[1
]}

Heckl, WM ^{[1
]}

机构：

[1] Univ Munich, Inst Kristallog & Angew Mineral, D-80333 Munich, Germany

来源：

ULTRAMICROSCOPY | 2001年 / 86卷 / 1-2期

关键词：

atomic-force microscopy;

D O I：

10.1016/S0304-3991(00)00077-2

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We have calculated the thermal noise of a v-shaped AFM cantilever (Microlever. Type E: Thermomicroscopes) by means of a finite element analysis. The modal shapes of the first 10 eigenmodes are displayed as well as the numerical constants, which are needed for the calibration using the thermal noise method. In the first eigenmode. values for the thermomechanical noise of the z-displacement at 22 degreesC temperature of root [u(1)(2)] = 0.627 Angstrom/rootc(cant) and the photodiode signal (normal-force) of root [S-1(2)] = 0.558 Angstrom/rootc(cant) were obtained The results also indicate a systematic deviation of the spectral density of the thermomechanical noise of v-shaped cantilevers as compared to rectangular beam-shaped cantilevers. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：207 / 215

页数：9

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