Using colloidal lithography to fabricate and optimize sub-wavelength pyramidal and honeycomb structures in solar cells

被引:150
作者
Chen, H. L. [1 ]
Chuang, S. Y.
Lin, C. H.
Lin, Y. H.
机构
[1] Natl Taiwan Univ, Dept Mat Sci & Engn, Taipei 10764, Taiwan
[2] Natl Nano Device Lab, Hsinchu, Taiwan
关键词
D O I
10.1364/OE.15.014793
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The external quantum efficiency of solar cells can be improved by using texturing pyramid- and honeycomb-like structures with minimum reflection. In this study, we investigated the reflection properties of texturing structures through rigorous coupled-wave analysis and the three-dimensional finite-difference time domains (FDTD) method to analyze close-packed texturing structures. We also demonstrate a simple method combining sub-wavelength-scale monolayer and bilayer polystyrene spheres with a one-step reactive ion etching process-to fabricate optimized pyramid- and honeycomb- shaped antireflection structures, respectively. Thus, sub-wavelength pyramidal and honeycomb- like structures displaying low reflectance were obtained readily without the need for any lithography equipment. (C) 2007 Optical Society of America.
引用
收藏
页码:14793 / 14803
页数:11
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