Modified Fresnel zone plates that produce sharp Gaussian focal spots

被引：50

作者：

Cao, Q ^{[1
]}

Jahns, J ^{[1
]}

机构：

[1] FernUniv Hagen, D-58084 Hagen, Germany

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 2003年 / 20卷 / 08期

关键词：

D O I：

10.1364/JOSAA.20.001576

中图分类号：

O43 [光学];

学科分类号：

070207 [光学]; 0803 [光学工程];

摘要：

A modified Fresnel zone plate that can produce an approximate Gaussian focal spot is proposed for the focusing and imaging of soft x rays and extreme ultraviolet radiation. The selection conditions for the positions and the widths of the concentric open rings are analytically presented. The focal spot size can be much smaller than the width of the narrowest open ring, and the sidelobes and the higher orders can be effectively suppressed. Through numerical experiments, we confirm that a Gaussian focal spot with a beam width of 7.7 nm can be produced by a modified Fresnel zone plate with a minimum structure size of 30 nm. (C) 2003 Optical Society of America.

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收藏

页码：1576 / 1581

页数：6

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