Characterization of thin-film aerogel porosity and stiffness with laser-generated surface acoustic waves

被引:43
作者
Flannery, CM
Murray, C
Streiter, I
Schulz, SE
机构
[1] Paul Drude Inst Solid State Elect, Nanoacoust Grp, D-10117 Berlin, Germany
[2] Tech Univ Chemnitz, Ctr Microtechnol, ZFM, D-09107 Chemnitz, Germany
关键词
porous silica; xerogels; elastic properties; dielectric properties; surface acoustic waves;
D O I
10.1016/S0040-6090(01)00827-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Density/porosity is the most important parameter determining properties of porous films; however, it is difficult to measure. This letter reports characterization of density/porosity and Young's modulus values of a range of nanoporous silica aerogel films via dispersion of laser-generated, wideband, surface acoustic waves. The technique shows a clear relationship between dielectric constant, porosity and Young's modulus. Low Young's modulus values show that film stiffness is drastically reduced with increasing porosity. The technique is rapid, non-destructive and relatively inexpensive, and yields absolute values of aerogel elastic properties, which are useful for process control; such properties are difficult to access using other techniques. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1 / 4
页数:4
相关论文
共 16 条
  • [1] Surface acoustic wave velocity and attenuation dispersion measurement by phase velocity scanning of laser interference fringes
    Cho, H
    Sato, H
    Takemoto, M
    Sato, A
    Yamanaka, K
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (5B): : 3062 - 3065
  • [2] BROAD-BAND DETECTION OF LASER-EXCITED SURFACE ACOUSTIC-WAVES BY A NOVEL TRANSDUCER EMPLOYING FERROELECTRIC POLYMERS
    COUFAL, H
    GRYGIER, R
    HESS, P
    NEUBRAND, A
    [J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1992, 92 (05) : 2980 - 2983
  • [3] CRACIUN F, 1997, P IEEE ULTR S, P573
  • [4] 20-MHZ ACOUSTIC-WAVES FROM PULSED THERMOELASTIC EXPANSIONS OF CONSTRAINED SURFACES
    GUTFELD, RJV
    MELCHER, RL
    [J]. APPLIED PHYSICS LETTERS, 1977, 30 (06) : 257 - 259
  • [5] Nanoporous silica as an ultralow-k dielectric
    Jin, CM
    Luttmer, JD
    Smith, DM
    Ramos, TA
    [J]. MRS BULLETIN, 1997, 22 (10) : 39 - 42
  • [6] SiO2 aerogel film as a novel intermetal dielectric
    Jo, MH
    Park, HH
    Kim, DJ
    Hyun, SH
    Choi, SY
    Paik, JT
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 82 (03) : 1299 - 1304
  • [7] KUSCHNEREIT R, 1995, APPL PHYS A-MATER, V61, P269, DOI 10.1007/BF01538192
  • [8] Surface modified spin-on xerogel films as interlayer dielectrics
    Nitta, SV
    Pisupatti, V
    Jain, A
    Wayner, PC
    Gill, WN
    Plawsky, JL
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (01): : 205 - 212
  • [9] SILICA AEROGEL FILMS PREPARED AT AMBIENT-PRESSURE BY USING SURFACE DERIVATIZATION TO INDUCE REVERSIBLE DRYING SHRINKAGE
    PRAKASH, SS
    BRINKER, CJ
    HURD, AJ
    RAO, SM
    [J]. NATURE, 1995, 374 (6521) : 439 - 443
  • [10] Acoustic waveguide properties of a thin film of nanoporous silica on silicon
    Rogers, JA
    Case, C
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (06) : 865 - 867