Fabrication and evaluation of an on-chip micro-variable inductor

被引：19

作者：

Fukushige, T ^{[1
]}

Yokoyama, Y ^{[1
]}

Hata, S ^{[1
]}

Masu, K ^{[1
]}

Shimokohbe, A ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa, Japan

来源：

MICROELECTRONIC ENGINEERING | 2003年 / 67-8卷

关键词：

impedance matching; radio frequency circuit; variable inductor; metallic glass;

D O I：

10.1016/S0167-9317(03)00117-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Precise impedance matching in RF circuits and wide-range tuning on wireless communication equipment require variable inductors. We propose a new type of on-chip micro-variable inductor fabricated using MEMS technology. The inductor is a conical coil and has an inductance of a few nH. The coil height can be changed from zero to several hundred micrometers. The inductance value varies according to the height, which can be determined arbitrarily either at fabrication or after fabrication. Thin film metallic glass, a new MEMS material, was used to realize the conical coil. The measured and simulated electrical characteristics (S-11 parameter) indicate that this inductor can be used at 50 MHz to 16 GHz. The relationship between the inductance and the height indicates that the tuning range of the inductance is 3.64 to 3.75 nH at 2 GHz. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：582 / 587

页数：6

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