Theoretical investigation of the equilibrium surface structure of Si1-x-yGexCy alloys

被引：24

作者：

Kelires, PC

机构：

[1] Univ Crete, Dept Phys, Heraklion 71003, Crete, Greece

[2] Fdn Res & Technol Hellas, Heraklion 71110, Crete, Greece

来源：

SURFACE SCIENCE | 1998年 / 418卷 / 02期

关键词：

alloys; Monte Carlo and statistical methods; segregation; surface structure;

D O I：

10.1016/S0039-6028(98)00758-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We investigate the surface structure of SiGeC alloys at typical growth temperatures using Monte Carlo simulations within the empirical potential formalism. We find a strong tendency of carbon to segregate to the top layer. As a consequence, germanium segregation is drastically reduced. The carbon composition profile oscillates in the subsurface layers, with a marked enhancement in the third layer. Si-C dimers are the favored surface bonding geometry, and are mostly found in (2 x 2) and c(4 x 2) arrangements. (C) 1998 Published by Elsevier Science B.V. All rights reserved.

引用

页码：L62 / L67

页数：6

共 19 条

[1]

BERTI M, 1998, APPL PHYS LETT, V72, P13

[2] THEORETICAL INVESTIGATION OF RANDOM SI-C ALLOYS [J].