Preparation and properties of (Ba0.7Sr0.3)TiO3 powders and thin films using precursor solutions formed from alkoxide-hydroxide

被引:17
作者
Hayashi, T
Shinozaki, H
Sasaki, K
机构
[1] Shonan Inst Technol, Dept Mat Sci & Ceram Technol, Kanagawa 2518511, Japan
[2] Dupont Co, Expt Stn, Div Mat, Dept Elect, Wilmington, DE 19898 USA
关键词
films; powders; chemical preparation; sol-gel processes; dielectric properties; (Ba0.7Sr0.3); TiO3;
D O I
10.1016/S0955-2219(98)00364-1
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
(Ba0.7Sr0.3) TiO3 powders and thin films were prepared using alkoxide-hydro oxide route. Solutions of Ba and Sr hydroxides dissolved in methanol were reacted with Ti-isopropoxide under conditions of stirring at room temperature for 15 h, and then dried under reduced pressure at less than or equal to 40 degrees C to prepare precursors of (Ba0.7Sr0.3) TiO3 powder. The amorphous precursors were hydrolyzed at 100 degrees C by introducing nitrogen gas containing water vapor. The hydrolyzed products were crystalline nanosize powders of (Ba0.7Sr0.3) TiO3 As-hydrolyzed (Ba0.7Sr0.3) TiO3 powders showed a good crystallinity with cubic phase. (Ba0.7Sr0.3) TiO3 thin films were also successfully prepared at 650 degrees C on Pt/Ti/SiO2/Si substrates from precursor solutions obtained by the reaction of alkoxide with hydroxides. The (Ba0.7Sr0.3) TiO3 thin films exhibited the microstructure with fine grains as small as 20-60 nm. The dielectric constants of the thin films ranged from 600 to 800 at room temperature. (C) 1999 Elsevier Science Limited. All rights reserved.
引用
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页码:1011 / 1016
页数:6
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