Porosity and mechanical properties of mesoporous thin films assessed by environmental ellipsometric porosimetry

被引:376
作者
Boissiere, C
Grosso, D
Lepoutre, S
Nicole, L
Bruneau, AB
Sanchez, C
机构
[1] Univ Paris 06, Lab Chim Mat Condensee, F-75252 Paris, France
[2] Univ Paris 06, CNRS, UMR 7601, Inst Nanosci Paris, F-75015 Paris, France
关键词
D O I
10.1021/la050981z
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Mesoordered silica thin films with cubic structures were prepared by evaporation induced self-assembly (EISA) with two types of structuring agent (CTAB and block copolymer F127). A complete and accurate description of these films was obtained by combining 2D-SAXS analyses, variable angle spectroscopic ellipsometry, and a specially designed environmental ellipsometric porosimetry (EEP) experiment. The EEP analysis is rapid and cheap and operates at ambient pressure and temperature. This latter experiment was performed with water and produced a set of water adsorption-desorption isotherms. A modified Kelvin equation, coupled with a modelisation of pores contraction, enabled the determination of the structural parameters of films porous networks: ellipsoidal pore diameters, porous volume, and surface area. Young moduli of films in the direction perpendicular to the substrates were calculated from these parameters.
引用
收藏
页码:12362 / 12371
页数:10
相关论文
共 38 条
[1]   Determination of pore size distribution in thin films by ellipsometric porosimetry [J].
Baklanov, MR ;
Mogilnikov, KP ;
Polovinkin, VG ;
Dultsev, FN .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (03) :1385-1391
[2]  
BAKLANOV MR, 2001, MAT RES SOC, V616
[3]   A new 3D organization of mesopores in oriented CTAB silica films [J].
Besson, S ;
Ricolleau, C ;
Gacoin, T ;
Jacquiod, C ;
Boilot, JP .
JOURNAL OF PHYSICAL CHEMISTRY B, 2000, 104 (51) :12095-12097
[4]   Water confined in lamellar structures of AOT surfactants:: An infrared investigation [J].
Boissière, C ;
Brubach, JB ;
Mermet, A ;
de Marzi, G ;
Bourgaux, C ;
Prouzet, E ;
Roy, P .
JOURNAL OF PHYSICAL CHEMISTRY B, 2002, 106 (05) :1032-1035
[5]   Determination of pore size distribution in thin organized mesoporous silica films by spectroscopic ellipsometry in the visible and infrared range [J].
Bourgeois, A ;
Bruneau, AB ;
Fisson, S ;
Demarets, B ;
Grosso, D ;
Cagnol, F ;
Sanchez, C ;
Rivory, J .
THIN SOLID FILMS, 2004, 447 :46-50
[6]   Reactivity of 3D hexagonal mesoporous silica films to environment studied by infrared ellipsometry [J].
Brunet-Bruneau, A ;
Besson, S ;
Gacoin, T ;
Boilot, JP ;
Rivory, J .
THIN SOLID FILMS, 2004, 447 :51-55
[7]   Humidity-controlled mesostructuration in CTAB-templated silica thin film processing. The existence of a modulable steady state [J].
Cagnol, F ;
Grosso, D ;
Soler-Illia, GJDAS ;
Crepaldi, EL ;
Babonneau, F ;
Amenitsch, H ;
Sanchez, C .
JOURNAL OF MATERIALS CHEMISTRY, 2003, 13 (01) :61-66
[8]   Hydrophobic and hydrophilic behavior of micelle-templated mesoporous silica [J].
Cauvel, A ;
Brunel, D ;
DiRenzo, F ;
Garrone, E ;
Fubini, B .
LANGMUIR, 1997, 13 (10) :2773-2778
[9]   Controlled formation of highly organized mesoporous titania thin films:: From mesostructured hybrids to mesoporous nanoanatase TiO2 [J].
Crepaldi, EL ;
Soler-Illia, GJDA ;
Grosso, D ;
Cagnol, F ;
Ribot, F ;
Sanchez, C .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2003, 125 (32) :9770-9786
[10]   Structural characterization of mesoporous organosilica films for ultralow-k dielectrics [J].
de Theije, FK ;
Balkenende, AR ;
Verheijen, MA ;
Baklanov, MR ;
Mogilnikov, KP ;
Furukawa, Y .
JOURNAL OF PHYSICAL CHEMISTRY B, 2003, 107 (18) :4280-4289