Enhanced output power in GaN-based LEDs with naturally textured surface grown by MOCVD

被引:48
作者
Tsai, CM [1 ]
Sheu, JK
Lai, WC
Hsu, YP
Wang, PT
Kuo, CT
Kuo, CW
Chang, SJ
Su, YK
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Taipei 70101, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Taipei 70101, Taiwan
[3] Natl Cheng Kung Univ, Inst Electroopt Sci & Engn, Taipei 70101, Taiwan
[4] S Epitaxy Corp, Hsinchu 744, Taiwan
关键词
InGaN LED; Mg-treatment; textured surfaces; truncated pyramids;
D O I
10.1109/LED.2005.851243
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
GaN-based light-emitting diodes (LEDs) with naturally textured surfaces grown by MOCVD were demonstrated. In this study, a growth-interruption step and a surface treatment using biscyclopentadienyl magnesium (CP2Mg) were simultaneously performed to form a plurality of nuclei sites on the surface of a p-type cladding layer, and then a p-type contact layer was grown on the p-type cladding layer, so as to create a p-type contact layer with a rough surface having truncated pyramids. Experimental results indicated that GaN-based LED with the truncated pyramids on the surface exhibited an enhancement in output power of 66% at 20 mA. It is worth noting that the typical 20-mA-driven forward voltage is only slightly higher than those of conventional LEDs (without the Mg-treatment process).
引用
收藏
页码:464 / 466
页数:3
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