A surface sol-gel process of TiO2 and other metal oxide films with molecular precision

被引：207

作者：

Ichinose, I ^{[1
]}

Senzu, H ^{[1
]}

Kunitake, T ^{[1
]}

机构：

[1] KYUSHU UNIV,FAC ENGN,DEPT CHEM SCI & TECHNOL,FUKUOKA 812,JAPAN

来源：

CHEMISTRY OF MATERIALS | 1997年 / 9卷 / 06期

关键词：

D O I：

10.1021/cm970008g

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Fabrication of metal oxide thin films with thickness control of nanometer precision is an important technology that leads to wide practical applications. The present study demonstrates that a surface sol-gel process, composed of chemisorption of alkoxide, rinsing, hydrolysis, and drying, is a superior technique for the preparation of ultrathin metal oxide films with molecular precision. The simplicity of this process should be a great advantage in commercial production of nanosized oxide films.

引用

页码：1296 / &

页数：4