Optical and mechanical performance of nanostructured cerium oxides for applications in optical devices

被引:27
作者
Charitidis, C [1 ]
Patsalas, P [1 ]
Logothetidis, S [1 ]
机构
[1] Aristotle Univ Thessaloniki, Dept Phys, GR-54124 Thessaloniki, Greece
来源
SECOND CONFERENCE ON MICROELECTRONICS, MICROSYSTEMS AND NANOTECHNOLOGY | 2005年 / 10卷
关键词
D O I
10.1088/1742-6596/10/1/056
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nanostructured CeO2-x films have been grown by electron beam evaporation (EBE) and ion beam assisted deposition (IBAD). The CeO2-x consists of grains with size 9-28 nm and nanoscale voids enhancing the surface and quantum-size effects. We investigate the size-dependent electronic properties of nanostructured CeO2-x films and we establish relations between them and the film structure, composition and morphology. We investigate how the structure and morphology variations affect the absolute values of the dielectric function at the UV-Vis and IR spectral regions. The nature of the fundamental gap E-g of CeO2-x is also considered. In addition we study in detail the light absorption mechanisms in the UV spectral regions and we correlate them with the reported band structures of the pure CeO2 and Ce2O3. We also employ nanoindentation testing to compare the mechanical response of CeO2-x films grown by EBE and IBAD. Correlations between the mechanical properties of the films and the growth parameters have been made providing the possibility of tailoring films with good mechanical performance for optical device applications.
引用
收藏
页码:226 / 229
页数:4
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