Fully integrated optical system for lab-on-a-chip applications

被引:24
作者
Balslev, S [1 ]
Bilenberg, B [1 ]
Geschke, O [1 ]
Jorgensen, AM [1 ]
Kristensen, A [1 ]
Kutter, JP [1 ]
Mogensen, KB [1 ]
Snakenborg, D [1 ]
机构
[1] Tech Univ Denmark, MIC, DK-2800 Lyngby, Denmark
来源
MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年
关键词
D O I
10.1109/MEMS.2004.1290529
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 mum thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.
引用
收藏
页码:89 / 92
页数:4
相关论文
共 11 条
[1]  
BILENBERG B, 2003, P 17 EUR C SOL STAT, P486
[2]   A micro-cavity fluidic dye laser [J].
Helbo, B ;
Kristensen, A ;
Menon, A .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (02) :307-311
[3]   Surface recombination velocity of phosphorus-diffused silicon solar cell emitters passivated with plasma enhanced chemical vapor deposited silicon nitride and thermal silicon oxide [J].
Kerr, MJ ;
Schmidt, J ;
Cuevas, A ;
Bultman, JH .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (07) :3821-3826
[4]  
LEISTIKO P, 1999, P SPIE MICR NAN STRU, P10
[5]   MINIATURIZED TOTAL CHEMICAL-ANALYSIS SYSTEMS - A NOVEL CONCEPT FOR CHEMICAL SENSING [J].
MANZ, A ;
GRABER, N ;
WIDMER, HM .
SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) :244-248
[6]  
MOGENSEN KB, 2003, INTEGRATION POLYM WA, V42, P4072
[7]   Photosensor and optical wave wide coupling in silicon technology [J].
Moreno, M ;
Dominguez, C ;
Munoz, J ;
Calderer, J ;
Morante, JR .
SENSORS AND ACTUATORS A-PHYSICAL, 1997, 62 (1-3) :524-528
[8]  
RASMUSSEN FE, 2003, P 1 INT S SCI TECHN, P218
[9]   Chip vision - optics for microchips [J].
Verpoorte, E .
LAB ON A CHIP, 2003, 3 (03) :42N-52N
[10]   Microfluidics meets MEMS [J].
Verpoorte, E ;
De Rooij, NF .
PROCEEDINGS OF THE IEEE, 2003, 91 (06) :930-953