Fully integrated optical system for lab-on-a-chip applications

被引：24

作者：

Balslev, S ^{[1
]}

Bilenberg, B ^{[1
]}

Geschke, O ^{[1
]}

Jorgensen, AM ^{[1
]}

Kristensen, A ^{[1
]}

Kutter, JP ^{[1
]}

Mogensen, KB ^{[1
]}

Snakenborg, D ^{[1
]}

机构：

[1] Tech Univ Denmark, MIC, DK-2800 Lyngby, Denmark

来源：

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/MEMS.2004.1290529

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 mum thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.

引用

页码：89 / 92

页数：4