An integrated gas sensor technology using surface micro-machining

被引：7

作者：

Chan, PCH ^{[1
]}

Yan, GZ ^{[1
]}

Sheng, LY ^{[1
]}

Sharma, RK ^{[1
]}

Tang, ZN ^{[1
]}

Sin, JKO ^{[1
]}

Hsing, IM ^{[1
]}

Wang, YY ^{[1
]}

机构：

[1] Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R China

来源：

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2001年

关键词：

D O I：

10.1109/MEMSYS.2001.906599

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the silicon based integrated gas sensor technology using surface micro-machined micro-hotplate. Using this technology, an integrated gas sensor sensitive to 1ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas sensor array application.

引用

页码：543 / 546

页数：4

共 4 条

[1] Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications [J].

Fung, SKH ;

Tang, ZN ;

Chan, PCH ;

Sin, JKO ;

Cheung, PW .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 54 (1-3) :482-487

[2] A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering [J].

Sheng, LY ;

Tang, ZN ;

Wu, J ;

Chan, PCH ;

Sin, JKO .

SENSORS AND ACTUATORS B-CHEMICAL, 1998, 49 (1-2) :81-87

[3] TIN OXIDE GAS SENSOR FABRICATED USING CMOS MICRO-HOTPLATES AND INSITU PROCESSING [J].

SUEHLE, JS ;

CAVICCHI, RE ;

GAITAN, M ;

SEMANCIK, S .

IEEE ELECTRON DEVICE LETTERS, 1993, 14 (03) :118-120

[4]

Taguchi N., 1962, Japanese patent, Patent No. 4538200

← 1 →