Thin-film regular-array structures with 10-100 nm repeat distance

被引：23

作者：

Malac, M ^{[1
]}

Egerton, RF ^{[1
]}

机构：

[1] Univ Alberta, Dept Phys, Edmonton, AB T6G 2J1, Canada

来源：

NANOTECHNOLOGY | 2001年 / 12卷 / 01期

关键词：

D O I：

10.1088/0957-4484/12/1/303

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We show that regular arrays of pillars and helices, with repeat distance below 100 nm, can be grown by oblique deposition onto a patterned rotating substrate. The size limits for such structures are discussed.

引用

页码：11 / 13

页数：3

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