Diffusion of hydrosilanes from the control layer to the vinylsilane-rich flow membrane during the fabrication of microfluidic chips

被引:24
作者
Guo, DJ
Xiao, SJ [1 ]
Liu, HB
Chao, J
Xia, B
Wang, J
Pei, J
Pan, Y
Gu, ZZ
You, XZ
机构
[1] Nanjing Univ, Sch Chem & Chem Engn, State Key Lab Coordinat Chem, Nanjing 210093, Peoples R China
[2] SE Univ, State Key Lab Mol & Biomol Elect, Nanjing 210096, Peoples R China
关键词
D O I
10.1021/la0514866
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
During the fabrication of poly(dimethylsiloxane) (PDMS)-based microfluidic chips, polymethylhydrosiloxane (PMHS) species in the control layer diffuse into the flow membrane, which contains polymethylvinylsiloxane (PMVS), and the components cross-link together to form the mechanically enhanced membrane. The diffusion course was investigated by using attenuated total reflectance FTIR and the improvement of mechanical properties of the flow membrane was studied by measuring the Young's modulus and the tensile strength.
引用
收藏
页码:10487 / 10491
页数:5
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