Combinatorial study of reactively sputtered Cr-Ti-N

被引：9

作者：

Teplin, CW

van Hest, MFAM

Dabney, M

Perkins, CL

Gedvillas, LM

To, B

Parilla, PA

Keyes, BM

Perkins, JD

Ginley, DS

Lin, YP

Lu, YW

机构：

[1] Natl Renewable Energy Lab, Golden, CO 80401 USA

[2] Guardian Ind, Auburn Hills, MI 48326 USA

来源：

APPLIED SURFACE SCIENCE | 2004年 / 223卷 / 1-3期

关键词：

combinatorial; dc sputtering; CrN; TiN;

D O I：

10.1016/S0169-4332(03)00927-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A combinatorial study of ternary Cr-Ti-N libraries is reported. Sixteen libraries were grown with a range of metallic composition gradients and different nitrogen contents. X-ray photoelectron spectroscopy (XPS) and electron microprobe analysis (EPMA) show that these libraries encompass a large portion of the ternary phase space. Optical transmission and reflection measurements from near ultra-violet to infra-red wavelengths suggest that both the color and infra-red reflectivity can be optimized for this ternary system.(C) 2003 Elsevier B.V. All rights reserved.

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收藏

页码：253 / 258

页数：6

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