Control of crystal structure and ferroelectric properties of Pb(ZrxTi1-x)O3 films formed by pulsed laser deposition

被引：20

作者：

Fujita, H

Goto, S

Sakashita, M

Ikeda, H

Sakai, A

Zaima, S

Yasuda, Y

机构：

[1] Nagoya Univ, Grad Sch Engn, Dept Cristalline Mat Sci, Chikusa Ku, Nagoya, Aichi 4648603, Japan

[2] Nagoya Univ, Ctr Cooperat Res Adv Sci & Technol, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2000年 / 39卷 / 12B期

关键词：

ferroelectric properties; Pb(ZrxTi1-x)O-3 (PZT); pulsed laser deposition (PLD); orientation; trigonal;

D O I：

10.1143/JJAP.39.7035

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Pb(ZrxTi1-x)O-3 (PZT) thin films on Pt/SiO2/Si substrates formed by pulsed laser deposition (PLD) and subsequent rapid thermal annealing (RTA) have been investigated. X-ray diffraction (XRD) and atomic force microscopy showed that the crystalline structure and the crystallographic orientation of PZT films after RTA, sensitively depended on the microstructure of as-deposited films. The preferentially (100)-oriented perovskite PZT films forming a trigonal structure were obtained from the as-deposited films that had contained small grains having a pyrochlore structure. This type of perovskite structure was found to depend also on the oxygen pressure during PLD. Chemical composition analysis by X-ray photoelectron spectroscopy clearly revealed the characteristics of a Zr-rich composition which induced the trigonal phases in the films, which were consistent with the XRD results. The capacitors made from these films showed large remanent polarization.

引用

页码：7035 / 7039

页数：5

共 7 条

[1] Model experiments on fatigue of Pb(Zr0.53Ti0.47)O3 ferroelectric thin films [J].