Lithographically defined polymer tips for quartz tuning fork based scanning force microscopes

被引：8

作者：

Akiyama, T

Staufer, U

de Rooij, NF

Howald, L

Scandella, L

机构：

[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland

[2] Nanosurf AG, CH-4410 Liestal, Switzerland

来源：

MICROELECTRONIC ENGINEERING | 2001年 / 57-8卷

关键词：

scanning force microscopy; quartz tuning fork; polymer tip; SU-8; lithography;

D O I：

10.1016/S0167-9317(01)00482-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A process for batch fabricating and mounting polymer (SU-8, EPON) tips on a mass-produced quartz tuning fork wafer is proposed in this paper. In order to add a sharp tip to a side wall of such tuning forks, three unconventional procedures were combined with an optical lithography step: (1) gluing the sample and mask together; (2) coating a photosensitive polymer directly on this ensemble; and (3) inclining the mask during exposure. Sharp SU-8 tips with a 170 nm radius of curvature were obtained. These tuning fork sensors were successfully applied in scanning force microscope imaging in the dynamic mode. (C) 2001 Elsevier Science BY All rights reserved.

引用

页码：769 / 773

页数：5

共 5 条

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