Local growth of sol-gel films by means of microhotplates

被引：3

作者：

Calame, F ^{[1
]}

Baborowski, J ^{[1
]}

Ledermann, N ^{[1
]}

Muralt, P ^{[1
]}

Gentil, S ^{[1
]}

Setter, N ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, Fac Engn, Ceram Lab, CH-1015 Lausanne, Switzerland

来源：

INTEGRATED FERROELECTRICS | 2003年 / 54卷

关键词：

hotplates; tantalum silicide; local growth; PZT;

D O I：

10.1080/10584580390258921

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

PZT (PbZrx Ti1-xO3) thin films have been locally grown by means of sol-gel deposition and local annealing on microhotplates. The microhotplates were based on a stress compensated Si3N4 /SiO2 membranes as structural elements and contained tantalum silicide filaments (Ta5Si3) for resistive heating. Above the filaments, a passivation layer of SiO2, an adhesion layer of Ti/TiO2 and a bottom electrode of Pt were deposited. Due to the low heat conductivity of the membrane, crystallization of the PZT film occurs exactly on the resistor filament. The formation of crystalline phase, i.e. perovskite PZT was verified by means of X-ray diffraction. A random PZT texture has been observed.

引用

页码：549 / 556

页数：8

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