Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography

被引:44
作者
Singh, Vijay Raj [1 ]
Miao, Jianmin
Wang, Zhihong
Hegde, Gopalkrishna
Asundi, Anand
机构
[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore
[2] Indian Inst Sci, Dept Aerosp Engn, Bangalore 560012, Karnataka, India
关键词
in-line digital holography; vibration; time averaged method; MEMS; mean static deformation;
D O I
10.1016/j.optcom.2007.08.030
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this paper dynamic characterization of a MEMS diaphragm is investigated using lens-less time averaged in-line digital holography. The analysis and capability of the numerically reconstructed amplitude and phase information from in-line time averaged holograms as applied to MEMS vibration are presented. Particularly the effect of mean static state on the phase in time averaged digital holography is explored. A novel double exposure method is also demonstrated using a diverging object wave suitable for dynamic characterization of small size objects. A phase jump in the static deformation fringes in the vibrating regions is observed and described and can be used for precise analysis of vibration mode shape under simultaneous presence of mean static deformation. A simple and robust tool for dynamic optical metrology of MEMS devices and micro-objects using time averaged in-line digital holography is thus proposed. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:285 / 290
页数:6
相关论文
共 15 条
[1]   Time-averaged in-line digital holographic interferometry for vibration analysis [J].
Asundi, A ;
Singh, VR .
APPLIED OPTICS, 2006, 45 (11) :2391-2395
[2]   A digital holographic microscope for complete characterization of microelectromechanical systems [J].
Coppola, G ;
Ferraro, P ;
Iodice, M ;
De Nicola, S ;
Finizio, A ;
Grilli, S .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2004, 15 (03) :529-539
[3]   Detection of hidden stationary deformations of vibrating surfaces by use of time-averaged digital holographic interferometry [J].
Demoli, N ;
Vukicevic, D .
OPTICS LETTERS, 2004, 29 (20) :2423-2425
[4]   Effect of the fill factor of CCD pixels on digital holograms: comment on the papers "Frequency analysis of digital holography" and "Frequency analysis of digital holography with reconstruction by convolution" [J].
Guo, CS ;
Zhang, L ;
Rong, ZY ;
Wang, HT .
OPTICAL ENGINEERING, 2003, 42 (09) :2768-2771
[5]   ESPI - THE ULTIMATE HOLOGRAPHIC TOOL FOR VIBRATION ANALYSIS [J].
LOKBERG, OJ .
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1984, 75 (06) :1783-1791
[6]   MEMS metrology techniques [J].
Novak, E .
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, 2005, 5716 :173-181
[7]   Short-coherence digital microscopy by use of a lensless holographic imaging system [J].
Pedrini, G ;
Tiziani, HJ .
APPLIED OPTICS, 2002, 41 (22) :4489-4496
[8]   Transient vibration measurements using multi-pulse digital holography [J].
Pedrini, G ;
Froning, P ;
Fessler, H ;
Tiziani, HJ .
OPTICS AND LASER TECHNOLOGY, 1997, 29 (08) :505-511
[9]   High-speed digital holographic interferometry for vibration measurement [J].
Pedrini, Giancarlo ;
Osten, Wolfgang ;
Gusev, Mikhail E. .
APPLIED OPTICS, 2006, 45 (15) :3456-3462
[10]   Some opportunities for vibration analysis with time averaging in digital Fresnel holography [J].
Picart, P ;
Leval, J ;
Mounier, D ;
Gougeon, S .
APPLIED OPTICS, 2005, 44 (03) :337-343