Is aluminum a suitable buffer layer for carbon nanotube growth?

被引:36
作者
de los Arcos, T [1 ]
Wu, ZM [1 ]
Oelhafen, P [1 ]
机构
[1] Univ Basel, Inst Phys, CH-4056 Basel, Switzerland
关键词
D O I
10.1016/j.cplett.2003.09.057
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The possibility of using Al buffer layers for the catalytic chemical vapor deposition growth of carbon nanotubes has been investigated by in situ photoelectron spectroscopy. It was found that at the temperatures used for carbon nanotube growth, typically well above the eutectic temperature of the Al-Si system, the liquid Al-Si alloy formed getters efficiently the metallic catalyst away from the surface, thus precluding nanotube growth. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:419 / 423
页数:5
相关论文
共 11 条
[1]   PHOTOEMISSION-STUDIES OF ATOMIC REDISTRIBUTION AT GOLD-SILICON AND ALUMINUM-SILICON INTERFACES [J].
BRILLSON, LJ ;
KATNANI, AD ;
KELLY, M ;
MARGARITONDO, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :551-555
[2]   Influence of iron-silicon interaction on the growth of carbon nanotubes produced by chemical vapor deposition [J].
de los Arcos, T ;
Vonau, F ;
Garnier, MG ;
Thommen, V ;
Boyen, HG ;
Oelhafen, P ;
Düggelin, M ;
Mathis, D ;
Guggenheim, R .
APPLIED PHYSICS LETTERS, 2002, 80 (13) :2383-2385
[3]  
DELOSARCOC T, UNPUB CARBON
[4]   Growth of multiwall carbon nanotubes in an inductively coupled plasma reactor [J].
Delzeit, L ;
McAninch, I ;
Cruden, BA ;
Hash, D ;
Chen, B ;
Han, J ;
Meyyappan, M .
JOURNAL OF APPLIED PHYSICS, 2002, 91 (09) :6027-6033
[5]   Multilayered metal catalysts for controlling the density of single-walled carbon nanotube growth [J].
Delzeit, L ;
Chen, B ;
Cassell, A ;
Stevens, R ;
Nguyen, C ;
Meyyappan, M .
CHEMICAL PHYSICS LETTERS, 2001, 348 (5-6) :368-374
[6]   EFFECTS OF A THIN SIO2 LAYER ON THE FORMATION OF METAL-SILICON CONTACTS [J].
GOODNICK, SM ;
FATHIPOUR, M ;
ELLSWORTH, DL ;
WILMSEN, CW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03) :949-954
[7]  
Hansen M., 1958, CONSTITUTION BINARY, DOI DOI 10.1149/1.2428700
[8]  
Hufner S., 1996, PHOTOELECTRON SPECTR
[9]   Iron contamination in silicon technology [J].
Istratov, AA ;
Hieslmair, H ;
Weber, ER .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 70 (05) :489-534
[10]   IMPROVEMENT OF MINORITY-CARRIER DIFFUSION LENGTH IN SI BY AL GETTERING [J].
JOSHI, SM ;
GOSELE, UM ;
TAN, TY .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (08) :3858-3863