GC-MS investigation of hexamethyldisiloxane-oxygen fed plasmas

被引：25

作者：

Fracassi, F ^{[1
]}

d'Agostino, R ^{[1
]}

Fanelli, F ^{[1
]}

Fornelli, A ^{[1
]}

Palumbo, F ^{[1
]}

机构：

[1] Univ Bari, Dipartmento Chim, IMIP, CNR, I-70126 Bari, Italy

来源：

PLASMAS AND POLYMERS | 2003年 / 8卷 / 04期

关键词：

GC-MS; plasma chemistry; HMDSO;

D O I：

10.1023/A:1026333126452

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

This paper deals with the determination of by-products formed in plasmas fed with hexamethyldisiloxane (HMDSO), oxygen, and Ar. The gas effluent has been sampled by means of a cold trap and analyzed using gas chromatography-mass spectrometry. The results indicate that under the experimental conditions utilized, HMDSO is not activated by reactions with oxygen but mainly by electron collisions. Oxygen controls the overall chemistry of the plasma since it influences the quali-quantitative distribution of by-products. Many linear and cyclic oligomers have been observed and most of them contained one or more -Me2SiO-groups. The concentration of detected by-products, except trimethylsilylformate, decreases with O-2 addition.

引用

页码：259 / 269

页数：11

共 19 条

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