10-nm channel length pentacene transistors

被引:47
作者
Lee, JB [1 ]
Chang, PC
Liddle, JA
Subramanian, V
机构
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[2] IBM Semicond Res & Dev Ctr, Microelect Div, Hopewell Jct, NY 12533 USA
[3] Lawrence Berkeley Lab, Ctr Xray Opt, Berkeley, CA 94720 USA
基金
美国国家科学基金会;
关键词
E-beam lithography; nanoseale; organic thin-film transitors (OTFTs); pentacene;
D O I
10.1109/TED.2005.851845
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Organic thin-film transitors (OTFTs) were fabricated with channel lengths as small as 10 nm and an operating voltage of V-DD = -0.3 V using e-beam lithography. For sub-200-nm channel lengths, scaling L downwards resulted in increased on-current, decreased I-on/I-off ratio, V-T-rolloff, and drain-induced barrier lowering. These trends are correlated with device topology, electrostatics, and thin-film morphology. Nanoscale OTFT are interesting both as a means of studying intrinsic electrical properties of organic materials and as a possible route toward increasing on-current in organic devices. This paper sheds light on many of the issues encountered when shrinking organic devices, providing insight into approaches for optimizing nanoscaled OTFT.
引用
收藏
页码:1874 / 1879
页数:6
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