Lattice expansion in nanocrystalline niobium thin films

被引:104
作者
Banerjee, R
Sperling, EA
Thompson, GB
Fraser, HL
Bose, S
Ayyub, P
机构
[1] Ohio State Univ, Dept Mat Sci & Engn, Ctr Accelerated Maturat Mat, Columbus, OH 43210 USA
[2] Tata Inst Fundamental Res, Dept Condensed Matter Phys & Mat Sci, Bombay 400005, Maharashtra, India
关键词
D O I
10.1063/1.1582361
中图分类号
O59 [应用物理学];
学科分类号
摘要
High-purity nanocrystalline niobium (Nb) thin films have been deposited using high-pressure magnetron sputter deposition. Increasing the pressure of the sputtering gas during deposition has systematically led to reduced crystallite sizes in these films. Based on x-ray and electron diffraction results, it is observed that the nanocrystalline Nb films exhibit a significantly large lattice expansion with reduction in crystallite size. There is however, no change in the bcc crystal structure on reduction in crystallite size to below 5 nm. The lattice expansion in nanocrystalline Nb has been simulated by employing a recently proposed model based on linear elasticity and by appropriately modifying it to incorporate a crystallite-size-dependent width of the grain boundary. (C) 2003 American Institute of Physics.
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收藏
页码:4250 / 4252
页数:3
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