An investigation on piezoelectric energy harvesting for MEMS power sources

被引：64

作者：

Sohn, JW ^{[1
]}

Choi, SB ^{[1
]}

Lee, DY ^{[1
]}

机构：

[1] Inha Univ, Dept Mech Engn, Inchon 402751, South Korea

来源：

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE | 2005年 / 219卷 / 04期

关键词：

piezoelectric material; energy harvesting; MEMS device; finite element method;

D O I：

10.1243/095440605X16947

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

This paper presents the feasibility of using piezoelectric materials in a power source for micro-electro-mechanical systems (MEMS) devices. The finite element method (FEM) is adopted to evaluate the power generations of commercially available piezofilms that are subjected to a fluctuating pressure source (blood pressure). The accuracy of the results obtained from the FEM is verified by comparing with the corresponding results obtained from a theoretical analysis. In addition, an experiment is undertaken in order to evaluate the power generation of two different shapes of the piezofilms: square and circle. Finally, a brief discussion is made on the storage of experimentally harvested power and use of the MEMS applications.

引用

页码：429 / 436

页数：8