共 9 条
[1]
POLYCRYSTALLINE SILICON FILMS OBTAINED BY HOT-WIRE CHEMICAL-VAPOR-DEPOSITION
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1994, 59 (06)
:645-651
[2]
FORMATION OF POLYSILICON FILMS BY CATALYTIC CHEMICAL VAPOR-DEPOSITION (CAT-CVD) METHOD
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS,
1991, 30 (8B)
:L1522-L1524
[4]
PEIRO D, 1999, THESIS U BARCELONA
[9]
VOZ C, 2000, IN PRESS P 16 EUR PH